Recently. the Exponentially Weighted Moving Average (EWMA) controller has become a popular control method in Run-to-Run (RtR) process control. but the issue of measurement noise from metrology tools has not been addressed in RtR EWMA controllers yet. This paper utilizes a Kalman Filter (KF) controller to deal with measurement noise in RtR process control and investigates the output pr... https://cosmeticssquadets.shop/product-category/intimate-wash/
Assessing Measurement Noise Effect in Run-to-Run Process Control: Extends EWMA Controller by Kalman Filter
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